Drive simulation analysis of piezoelectric valveless micropump based on ZnO nanorod array
نویسندگان
چکیده
Abstract In this paper, ZnO nanorods are combined with the driving mechanism of a piezoelectric micropump to design valveless micropump. The were prepared by magnetron sputtering method grow seed crystal layer on silicon surface and then hydrothermal method. growth under different solution concentrations, temperatures, times was investigated, analytical methods for analyzing morphology elemental content nanorods. Then, simulation using optimal conditions as oscillators carried out COMSOL finite element analysis software, maximum output flow rate about 14.40 μL/s achieved at 100 V50 Hz.
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ژورنال
عنوان ژورنال: Journal of physics
سال: 2023
ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']
DOI: https://doi.org/10.1088/1742-6596/2578/1/012024